1667, from arch (adj.) + fiend (n.). Originally and typically Satan (arch-foe "Satan" is from 1610s).
So stretcht out huge in length the Arch-fiend lay. ["Paradise Lost," 1667]
archeology
archer
archery
archetypal
archetype
arch-fiend
Archibald
Archilochian
Archimedean
archipelago
architect