1530s, "without being aware," from un- (1) "not" + aware + adverbial genitive -s. Meaning "without being noticed" is recorded from 1660s. Form unaware is recorded from 1590s.
came upon the diamond unawares
rain caught them unawares
unavailability
unavailable
unavailing
unavoidable
unaware
unawares
unbalance
unbalanced
unbar
unbearable
unbeatable