Online Etymology Dictionary

self-conscious (adj.): 1680s, "aware of one's action," a word of the English Enlightenment (Locke was using it by 1690), from self- + conscious. Morbid sense of "preoccupied with one's own personality" is attested from 1834 (in J.S. Mill). Related: Self-consciously; self-consciousness.
self-contained (adj.): 1590s, from self- + contained (see contain).
self-control (n.): 1711, from self- + control (n.). Coined by English moral philosopher Anthony Ashley Cooper Shaftesbury (1671-1713).
self-criticism (n.): 1780, from self- + criticism. First attested in George Eliot; communist party sense is attested from 1933.
self-deception (n.): 1670s, from self- + deception.
self-defense (n.): 1650s, "act of defending oneself," first attested in Hobbes, from self- + defense. In sports sense, first with reference to fencing (1728), then boxing (1820s).
self-deluded (adj.): 1766, from self- + deluded (see delude).
self-denial (n.): 1640s, from self- + denial.
self-deprecating (adj.): 1835, from self- + deprecating (see deprecate).
self-deprecation (n.): 1843, from self- + deprecation.
self-destruct (v.): in reference to things, "to destroy itself automatically," from self- + destruct, apparently first attested in the U.S. television series "Mission Impossible" (1966). Self-destructive is recorded from 1650s, and self-destruction "suicide" is attested from 1580s.
self-determination (n.): 1680s, "determination of mind," from self- + determination. Political sense is attested from 1911, popularized by U.S. President Woodrow Wilson (1856-1924).
self-discipline (n.): also self discipline, 1796, from self- + discipline (n.). Related: Self-disciplined.
self-educated (adj.): 1761, from self- + educated.
self-effacing (adj.): 1902, from self- + effacing (see efface). Self-effacement is recorded from 1866.
self-esteem (n.): 1650s, from self- + esteem (n.). Popularized by phrenology, which assigned it a "bump" (Spurzheim, 1815).
self-evident (adj.): 1680s, from self- + evident. First attested in Locke's "Essay Concerning Human Understanding." Related: Self-evidently.
self-examination (n.): 1640s, from self- + examination.
self-explanatory (adj.): 1813, from self- + explanatory.
self-glorification (n.): 1826, from self- + glorification.
self-government (n.): 1734, of persons; 1798, of states, from self- + government. Related: Self-governing (1680s).
self-help (n.): 1831, from self- + help (n.). Apparently coined by Carlyle. British Self-Help Emigration Society is attested from 1887.
self-image (n.): also self-image, 1904 in psychology, from self- + image (n.).
self-immolation (n.): also self immolation, 1817, from self- + immolation.
self-important (adj.): "having or showing an exaggerated estimation of one's own importance," 1728, from self- + important. Related: Self-importance (1728).
self-improvement (n.): also self improvement, 1748, from self- + improvement.
self-incrimination (n.): also self incrimination, 1892, from self- + incrimination.
self-indulgence (n.): also self indulgence, 1753, from self- + indulgence.
self-indulgent (adj.): also self indulgent, 1791, from self- + indulgent. Related: Self-indulgently.
self-inflict (v.): 1784, from self- + inflict. Related: self-inflicted.
self-interest (n.): also self interest, 1640s, from self- + interest (n.). Related: Self-interested.
[Self-interest] is a doctrine not very lofty, but clear and sure. It does not seek to attain great objects; but it attains those it aims for without too much effort. ... [It] does not produce great devotion; but it suggests little sacrifices each day; by itself it cannot make a man virtuous; but it forms a multitude of citizens who are regulated, temperate, moderate, farsighted, masters of themselves; and if it does not lead directly to virtue through the will, it brings them near to it insensibly through habits. [Alexis de Tocqueville, "Democracy in America"]
self-involved (adj.): 1812, from self- + involved.
self-justification (n.): 1650s, from self- + justification.
self-love (n.): also self love, 1560s, from self- + love (n.).
self-made (adj.): 1610s, "made by oneself," from self- + made. Self-made man first recorded 1832, American English; the sense is "having attained material success in life without extraneous advantages."
self-motivation (n.): 1980 (self-motivated attested from 1949), from self- + motivation. Related: Self-motivational.
self-perception (n.): 1670s, from self- + perception.
self-perfection (n.): "perfection of one's character or life," 1810, from self- + perfection.
self-pity (n.): 1620s, from self- + pity (n.). Related: Self-pitying.
self-portrait (n.): 1821, from self- + portrait, translating German Selbstbildnis.
self-possession (n.): "command of one's emotions," 1745, from self- + possession (n.). Related: Self-possessed.
self-preservation (n.): 1610s, from self- + preservation. First attested in Donne.
self-protection (n.): 1706, from self- + protection.
self-realization (n.): also self realization, 1839, from self- + realization.
self-regard (n.): 1590s, from self- + regard (n.).
self-regulating (adj.): 1837, from self- + present participle of regulate (v.).
self-reliance (n.): 1883, from self- + reliance. First recorded in J.S. Mill.
self-reliant (adj.): 1826, from self- + reliant.
self-respect (n.): also self respect, "proper regard for and care of the dignity of one's person," 1795, from self- + respect (n.). Related: Self-respecting.
self-restraint (n.): 1754, from self- + restraint.